PROCESS AND DEVICE FOR THE ANALYSIS AND DETERMINATION OF THE CONCENTRATION OF ELEMENTS IN THE SURFACE REGION OF OBJECTS.

摘要

The proposal is for a process and device (10) for the analysis and determination of the concentration of elements at predetermined depths in substantially plane objects (11) of low roughness by the total-reflection X-ray fluorescence analysis method. Here, the object (11) is scraped externally by a pulverisation or evaporation process and immediately examined at a measurement point (14) in the scraped region of the object's surface by the total-reflection X-ray fluorescence analysis method.