| 摘要 |
<p>A stage device includes a movable stage (3) being movable along a path having a constant speed movement region and an acceleration region, a first thrust producing system (A1,A2) for accelerating and moving the movable stage in the acceleration region of the path, and a second thrust producing system (A3), separate from the first thrust producing system, for moving the movable stage at a constant speed in the constant speed movement region of the path. <IMAGE></p> |
