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发明名称
SUBSTRATE CONVEYANCE SYSTEM, RESIST COATING/DEVELOPING APPARATUS USINT IT, AND ITS USAGE METHOD
摘要
申请公布号
JPH07312335(A)
申请公布日期
1995.11.28
申请号
JP19940103552
申请日期
1994.05.18
申请人
SONY CORP
发明人
IKEDA RIKIO
分类号
B65G49/00;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/027
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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