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发明名称
CVD GAS FEEDER
摘要
申请公布号
JPH07310185(A)
申请公布日期
1995.11.28
申请号
JP19940098687
申请日期
1994.05.12
申请人
HITACHI LTD
发明人
MIZUKOSHI KATSURO;HONGO MIKIO;TAKADA ATSUKIMI;KAWAJI MOTONORI;YAMADA TOSHIO
分类号
C23C16/44;C23C16/448;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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