Spatial light modulator element with amorphous film of germanium, carbon and silicon for light blocking layer

摘要

A spatial light modulator includes at least a photoconductive layer, one transparent electrode film provided on one surface of the photoconductive layer, a light blocking layer provided on the other surface of the photoconductive layer, a dielectric multilayered film provided on the light blocking layer, a light modulation layer provided on the dielectric multilayered film, and the other transparent electrode film provided on the surface of the light modulation layer, said light modulation layer consisting of a liquid crystal material for changing intensity, phase or running direction of read-out light by applying a voltage, wherein the light blocking layer is an amorphous film consisting essentially of 5-45 atomic % of germanium, 17.5-92.5 atomic % of carbon and 2.5-77.5 atomic % of silicon. Thereby, the magnification of the intensity of read-out light to intensity of write-in light can be increased.