Höchstaperturiges katadioptrisches Reduktionsobjektiv für die Miktrolithographie

摘要

A catadioptric reducing object lens with a concave mirror (19'), beam divider (150') and several lens groups (100', 200', 300', 400'), in which the system diaphragm (40') is fitted between the beam divider surface (15') and the image plane (36'), especially within the last lens group (400'). NA = 0.7; for UV, DUV; telecentric on the image side or on both sides; also achromatised.