High temperature diffusion furnace.

摘要

The furnace (70) includes a heating element (72) which is restrained from growth during operation of the furnace (70) by retaining spacers (84) which provide a yoke (88) around the individual coils (102) of the heating element (72) and which spacers (84) are interlocked with each other. A high alumina fiber insulation (180) is applied to insulate the heating element (72). This high alumina fiber insulation (180) has enhanced properties with respect to shrinkage devitrification. <IMAGE>