| 摘要 |
PURPOSE:To provide an optical distortion inspecting device which can perform accurate evaluation without variation and, at the same time, quantitatively express the range of optical distortion of an object to be inspected having a light transmitting property by inspecting the object for optical distortion by quantitatively extracting the distortion. CONSTITUTION:An object W to be inspected, slit 3, and plane of projection 5 are successively arranged in the projecting direction of illuminating light emitted from a light source unit 2. Since part of the light emitted from the unit 2 is intercepted by the slit hole of the slit 3 arranged between the unit 2 and object, the light is passed through the object W and projected upon the plane 5. The picture of the projected image is taken with a picture inputting section 6 and picture signals are outputted to a picture processing section 7. The section 7 divides the inputted picture signals into a plurality of parts, discriminates the presence/absence of distortion based on the degree of variation of the gradation level of each picture element in each part, and finds the ratio of the area of distorted part to the whole area of gradation picture. |
