| 摘要 |
PURPOSE:To lessen the change in plasma density per unit volume at a space section and to suppress the generation of a plasma sheath by providing an anode on one end side of a laser pipe, and a cylindrical cathode joined to the other end of the laser pipe and formed so as to have an inside diameter approximately equal to a discharging thin pipe. CONSTITUTION:A first container 23 and a second container 24 having approximately equal outside diameters are hermetically connected, to both end surfaces of a laser pipe 21 having a discharging thin pipe 22 penetrating in the axial direction. The first container 23 is provided with a cylindrical anode 25 having the same axis as the laser pipe. Besides, a columned recession 26 is formed at the other end part of the laser pipe 21 concentrically with the discharging thin pipe 22, and a cylindrical cathode 27 is put inside. The inside diameter of this cathode 27 is equal to that of the discharging thin pipe 22, and the cathode 27 is provided in the recession 26 causing its inner circumferential surface to coincide with that of the discharging thin pipe 22. To the periphery of the cathode 27, a heating coil 28 is fitted, and a high voltage power source is connected to the cathode 27 and the coil 28. |
