Gas stream treatment method for removing per-fluorocarbons

摘要

A per-fluorocarbon containing gas is treated by contacting per-fluorocarbon contained within the gas with calcium hydride at a temperature in a range of between about 450 and 900 DEG C. The calcium hydride can be contained in a bed mixed with silicon or calcium oxide and such bed can be used in conjunction with a downstream bed of calcium oxide to remove any hydrogen fluoride produced. Also, an upstream bed of calcium fluoride can be used to treat acid gases in case of semiconductor processing applications of the present invention.