| 摘要 |
PURPOSE:To obtain a spiral-shaped bimorph-type actuator which is suitable for automation and mass production and whose sensitivity does not become irregular by a method wherein a mixture of a ceramic material and a binder is compressed and molded to be a spiral shape by using a mold which is formed by an extrusion molding operation and which has a spiral-shaped space. CONSTITUTION:A spiral-shaped bimorph-type ceramic actuator is manufactured by using two layers of piezoelectric materials 20, 50 which use a metal elastic plate 40 as a central electrode. In this case, molds 10, 30 which are formed by a plastic extrusion molding operation and which are provided with spiralshaped spaces 11, 31 are molded, a mixture of a ceramic material and a binder is filled into the spiral-shaped spaces 11, 31, it is compressed and molded, and a compressed and molded rod-shaped piezoelectric material is cut into thin round slices. For example, by using a mold 10 for molding of a first layer, a first-layer piezoelectric material 20 is molded, the first-layer piezoelectric material 20 and a metal elastic plate 40 are inserted into a space 31 in a mold 30 for molding of a second layer, and a mixture which is used to form a second-layer piezoelectric material 50 is filled, compressed and molded. |
