FORMING METHOD OF ANTIREFLECTION FILM AND FORMING METHOD OF FINE PATTERN,申请号JP19940101250-传众专利搜索

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发明名称	FORMING METHOD OF ANTIREFLECTION FILM AND FORMING METHOD OF FINE PATTERN
摘要
申请公布号	JPH07307277(A)	申请公布日期	1995.11.21
申请号	JP19940101250	申请日期	1994.05.16
申请人	SONY CORP	发明人	SATO JUNICHI
分类号	G03F7/11;H01L21/027;H01L21/302;H01L21/3065;(IPC1-7):H01L21/027;H01L21/306	主分类号	G03F7/11
代理机构		代理人
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地址

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