| 摘要 |
A device comprising a flat susceptor (14) rotating parallel to a reference surface (30) about a rotary shaft (20) perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the ferromagnetic elements (11) in the susceptor, of the rotary shaft, of the reference surface, of a magnetic actuating assembly (70), and of a gas inlet (40).
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