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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND ITS MANUFACTURING
摘要
申请公布号
JPH07307430(A)
申请公布日期
1995.11.21
申请号
JP19940098270
申请日期
1994.05.12
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KOMATA MAKOTO;EMATA KOJI;HORIUCHI HITOSHI;OKINAGA TAKAYUKI;HONDA ATSUSHI;SHIRAI MASAYUKI;SUZUKI HIROMICHI;HAYASHIDA TETSUYA
分类号
H01L23/50;(IPC1-7):H01L23/50
主分类号
H01L23/50
代理机构
代理人
主权项
地址
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