| 摘要 |
PURPOSE:To reduce the influence of the thermal strain of a box and to stabilize the pointing of a laser beam by arranging an input port and an output port for a thermal converter for supplying and exhausting a cooling medium, at line-symmetrical positions against the center line of a box parallel to discharging electrodes, when viewed from the vertical direction of the body. CONSTITUTION:A thermal converter 8 for cooling a laser medium gas heated to a high temperature by discharge at discharging electrodes 4a and 4b is provided in a box 10. The thermal converter has an input port 34 and an output port 36 for the thermal converter for supplying and exhausting a cooling medium. The input port 34 and the output port 36 for the thermal converter are arranged so that their positions may be approximately line-symmetrical against the center line of the box 10 parallel to the discharging electrodes 4a and 4b, when viewed from the vertical direction to the installation surface to the box 10. Consequently, the box 10 is cooled on the same, right and left to the direction of a laser beam, condition, and the box 10 to be cooled by the input port 34 and the output port 36 for the thermal converter is prevented from being bent by thermal strain. |
