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发明名称
MANUFACTURE OF THIN-FILM TRANSISTOR
摘要
申请公布号
JPH07307474(A)
申请公布日期
1995.11.21
申请号
JP19940120711
申请日期
1994.05.10
申请人
SONY CORP
发明人
HASHIMOTO MAKOTO
分类号
H01L21/28;H01L21/336;H01L29/40;H01L29/78;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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