Raster-Tunnel-Mikroskop.

摘要

A scanning tunneling microscope according to the present invention includes an observation optical system (2) for optically observing the surface of the object. The optical system (2) is fixed on an optical system fixing member (44). The optical system (2) is moved in a direction (Z-direction) vertical to the surface of the object (34) by means of a motor (46), whereby the focal point of the optical system is adjusted. An STM measurement probe (78) supported by an optically transparent member is disposed between the optical system (2) and the object (34). When the object (34) is optically observed, the probe (78) is displaced from the focal point by means of a micrometer (56). Thus, an optical observation image of the surface of the object (34), which is not affected by the shadow of the probe (78), can be obtained. When the STM measurement is carried out, a probe unit (68) enables the probe (78) to scan the surface of the object (34), and an STM image is obtained by a conventional method.