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发明名称
ATTUATORE PIEZOELETTRICO COMPATIBILE CON L'ULTRA ALTO VUOTO E RELATIVO PROCEDIMENTO DI FABBRICAZIONE
摘要
申请公布号
ITTS940004(A1)
申请公布日期
1995.11.17
申请号
IT1994TS00004
申请日期
1994.05.17
申请人
SINCROTRONE TRIESTE SOCIETA CONSORTILE PER AZIONI
发明人
MAZZOLINI FABIO;FAVA CLAUDIO;DE BONA FRANCESCO
分类号
H01L
主分类号
H01L
代理机构
代理人
主权项
地址
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