,申请号JP19880331925-传众专利搜索

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发明名称
摘要
申请公布号	JPH07106958(B2)	申请公布日期	1995.11.15
申请号	JP19880331925	申请日期	1988.12.28
申请人		发明人
分类号	C30B15/10;C03B19/09;C03B20/00;C30B29/06;H01L21/208;(IPC1-7):C30B15/10	主分类号	C30B15/10
代理机构		代理人
主权项
地址

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