METHOD OF FORMING SILICON OXIDE FILM.,申请号EP19900907409-传众专利搜索

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发明名称	METHOD OF FORMING SILICON OXIDE FILM.
摘要
申请公布号	EP0471845(B1)	申请公布日期	1995.11.15
申请号	EP19900907409	申请日期	1990.05.07
申请人	OHMI, TADAHIRO	发明人	OHMI, TADAHIRO;MORITA, MIZUHO
分类号	H01L21/316;(IPC1-7):H01L21/316	主分类号	H01L21/316
代理机构		代理人
主权项
地址

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