| 摘要 |
<p>PURPOSE:To generate higher discharge pressure by nipping an outer circumferential part of a piezoelectric vibrator in a casing to be fixed, providing a fluid intake port and a fluid discharge port on one side of the casing, and coating the piezoelectric vibrator with resin film of a specific thickness. CONSTITUTION:An outer circumferential part of a disc-shaped piezoelectric vibrator 6 is sealed and supported on inner circumferential surfaces of a casing 1 through fixing packings 7, and an AC voltage is applied to this piezoelectric vibrator 6 to vibrate the piezoelectric vibrator 6, so fluid is sucked into a pump chamber 9 from an intake port 2 through an intake check valve 4, and then discharged through a discharge check valve 5 from a discharge port 3. In this piezoelectric pump, the piezoelectric vibrator 6 is coated with resin film of a thickness of 0.3mm or less. In addition, mushroom valves having characteristics of an aperture pressure of 0.01kg/cm<2> or less, and a pressure resistance of 1kg/cm<2> or more are used for the check valves 4, 5. Higher discharge pressure can thus be generated.</p> |
