| 摘要 |
<p>PURPOSE:To provide a method and an apparatus in which a short circuit be tween interconnections on a board is repaired. CONSTITUTION:The ultraviolet part of a halogen lamp 11 is cut by a filter 13. While a short-circuited part on a board 17 which has been coated with a resist is being observed through an eyepiece 15 and an objective 16, it is irradiated. Then, the filter 13 is removed, a latent image is formed on the resist by means of ulttaviolet rays, the latent image is developed, and a mask is formed. After that, a defect part is etched and removed via the mask.</p> |
