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发明名称
COLLIMATING TYPE SPUTTERING DEVICE AND FILM FORMING METHOD USING THE SAME
摘要
申请公布号
JPH07300673(A)
申请公布日期
1995.11.14
申请号
JP19940112240
申请日期
1994.04.27
申请人
SONY CORP
发明人
TAGUCHI MITSURU
分类号
C23C14/34;C23C14/54;H01L21/285;H01L21/31;(IPC1-7):C23C14/54
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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