| 摘要 |
PURPOSE:To obtain a soft magnetic alloy thin film having high saturation magnetic flux density which shows excellent soft magnetic characteristics without high temperature heat treatment. CONSTITUTION:The title soft magnetic alloy thin film is shown by a composition formula FexNyOz. Preferably, it has four phases of iron oxide expressed by FeO3, iron nitride expressed by Fe4N, iron nitride expressed by Fe3N, and alpha-Fe, and x, y and z in the composition formula have relations of 0.00<=y<=0.12, 0.0055<=z<=0.12 and x+y+z=1. |
