Method of and an apparatus for measuring surface contour

摘要

A measurement-datum similar to profile of a measuring object set in a measuring area in which a detector and the measuring object are moved relatively is formed to measure the displacement value between the detector and the measuring object through the relative movement based on the measurement-datum to thereby compute the surface contour of the measuring object from the measured data with reference to the measurement-datum. Since the measurement-datum is set in the spatial area, a precise mechanical processing will not be required for an accurate measurement of the measuring object having a strange profile which was not measured by conventional apparatus.