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发明名称
POSITIVE TYPE RESIST COMPOSITION
摘要
申请公布号
JPH07301916(A)
申请公布日期
1995.11.14
申请号
JP19940114510
申请日期
1994.04.28
申请人
NIPPON ZEON CO LTD
发明人
KAWADA MASAJI;NAKAMURA MASAHIRO
分类号
G03F7/022;H01L21/027;(IPC1-7):G03F7/022
主分类号
G03F7/022
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代理人
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