AIR-COOLED PROCESSOR AND CONTINUOUSLY PROCESSING METHOD USING THIS PROCESSOR,申请号JP19940115865-传众专利搜索

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发明名称	AIR-COOLED PROCESSOR AND CONTINUOUSLY PROCESSING METHOD USING THIS PROCESSOR
摘要
申请公布号	JPH07302765(A)	申请公布日期	1995.11.14
申请号	JP19940115865	申请日期	1994.05.02
申请人	NIPPON ASM KK	发明人	IKEDO YOZO;INOUE MICHIO
分类号	H01L21/302;C23C16/44;C23C16/455;C30B25/02;H01L21/205;H01L21/3065;H01L21/31;(IPC1-7):H01L21/205;H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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