| 摘要 |
<p>PURPOSE:To reduce any foreign matter production by a method wherein a specimen takes a continuity to an edge part by a method wherein the edge part is pressed against the side of the specimen using a superhard material machined to an acute angled sharp edge. CONSTITUTION:A specimen wafer 2 mounted on a dielectric material 3 having adsorbing surface flatly machined takes a continuity nonmagnetic superhard material made sharp edge 1 from the side thereof. At this time, when the space between an electrode 4 and the wafer 2 holding the dielectric material 3 is impressed with a voltage from a voltage supply 5, the dielectric material 3 may be dielectric-polarized so that the dielectric material 3 and the wafer 2 may be adsorbed by the static electricity thereof. Through these procedures, the sharp edge 1 is pressed against the side of the specimen wafer 2, thereby enabling the scattering of any foreign matter on the specimen surface to be avoided. Furthermore, due to no scratching phenomenon of the specimen 2, any foreign matter production can be reduced.</p> |
