| 摘要 |
<p>PURPOSE:To process wafers of different sizes and shapes on the same sample holder. CONSTITUTION:A stopper A2 is fixed to a predetermined position of a main body 1 of a sample holder for determining the position of a wafer 6. A stopper B5 is pressed the wafer 5 fixed to a slider 4 and fixes its position. The slider 4 is attached to an arm 7 and moves by following the movement of the arm. A fulcrum 8 and a vacuum movable cylinder 3 are connected to both the ends of the arm 7, and the expansion and contraction of the vacuum movable cylinder are transmitted to the slider 4. Positions of stoppers A and B are changed depending upon the size of wafer. By doing this, various wafers with different sizes to small samples can be held by one holder so that this is very economical and also efficient.</p> |
