| 摘要 |
PURPOSE:To provide a ceramic heater element of low cost and high performance. CONSTITUTION:A ceramic heater element comprises a heat generating part having a specific resistance of 1X10<-2>-5X10<0>OMEGAcm, and mainly comprising molybdenum silicide - aluminum oxide mixed material. As additive, at least one sort of ZrC, WC, TaC, TiC, NbC, HfC, and MoC is included in total quantity of 0.01-10% volume %. |
