发明名称 DIAPHRAGM DEVICE AND PROJECTION AND EXPOSURE DEVICE USING IT
摘要 PURPOSE:To realize smooth diaphragm action without affecting a light shielding plate by using strong ultraviolet rays as exposing light by providing a projection part on the sliding surfaces of plural light shielding plates and bringing the light shielding plates into fine contact with each other through the projection parts. CONSTITUTION:An oscillating element 10 functioning as the projection part such as a piezoelectric element is fixed on the sliding surface of the light shielding plate 1a, and comes in point-contact with the light shielding plate so that a very small area being only the tip of the element 10 may come in contact with the light shielding plate 1b. A very small gap is formed between the light shielding plates 1a and 1b other than the contact part. The element 10 is oscillated in an up-and-down direction with a specified frequency through a lead wire 11 according to the command of an oscillation control part. In such a case, the element 10 and the lead wire 11 are positioned in an area where a return luminous flux is not made incident. Thus, a specified aperture diameter is obtained by smooth turning action.
申请公布号 JPH07301845(A) 申请公布日期 1995.11.14
申请号 JP19940117684 申请日期 1994.05.06
申请人 CANON INC 发明人 MIWA YOSHINORI
分类号 G03B9/02;G03B27/00;G03F7/20;H01L21/027;(IPC1-7):G03B9/02;G03B27/32 主分类号 G03B9/02
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