| 摘要 |
PCT No. PCT/EP92/00865 Sec. 371 Date Mar. 8, 1994 Sec. 102(e) Date Mar. 8, 1994 PCT Filed Apr. 18, 1992 PCT Pub. No. WO93/05294 PCT Pub. Date Mar. 18, 1993.The invention relates to a cryopump operated with a refrigerator, having a housing, having an inlet valve, having heatable pumping surfaces and having a backing pump connected to the pump interior; to be able to regenerate the cryopump quickly by executing the removal of the condensed gases at a high pressure, it is proposed that it is equipped with a line for the precipitates to be removed and that is provided with a regeneration valve.
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