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发明名称
HEAT-TREATING DEVICE
摘要
申请公布号
JPH07302790(A)
申请公布日期
1995.11.14
申请号
JP19940113584
申请日期
1994.04.28
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON TOHOKU LTD
发明人
SAITO YUKIMASA
分类号
H01L21/22;H01L21/31;H01L21/324;(IPC1-7):H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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