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发明名称
IC ELEMENT
摘要
申请公布号
JPH07302795(A)
申请公布日期
1995.11.14
申请号
JP19940326618
申请日期
1994.12.28
申请人
HITACHI LTD
发明人
HONGO MIKIO;SANO HIDEZO;MIZUKOSHI KATSURO;AZUMA JUNZO;AIUCHI SUSUMU
分类号
H01L21/3205;H01L21/268;H01L21/28;H01L21/285;H01L21/768;H01L23/52;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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