发明名称
摘要 PURPOSE:To precisely generate a distribution of simulation particles by dividing the density weight of particles corresponding to the probability of scattering into a state after reachable scattering and performing distribution into the reachable state. CONSTITUTION:Once a free run ends, respective scattering probabilities are calculated as functions of the energy of electrons to determine which mechanism scatters simulation particles by using uniform random numbers (P4). When a scattering mechanism whose scattering probability is isotropic in scattering angle among scatters is selected, the simulation particles are equally divided by the number of sections of angle gratings and distributed to a reachable cell. At the time of an ionized impurity scattering, on the other hand, the scattering probability is anistoropic with the angle, so the simulation particles are divided (P5) according to the weight of the scattering probability and distributed to a next specific cell (P6). Namely, the density weight of the simulation particles are divided into the state after the reachable scattering according to the scattering probability.
申请公布号 JPH07104852(B2) 申请公布日期 1995.11.13
申请号 JP19930020246 申请日期 1993.02.08
申请人 发明人
分类号 H01L21/66;G06F17/00;G06F17/17;G06F17/50;G06F19/00;H01L21/00 主分类号 H01L21/66
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