| 摘要 |
PURPOSE:To obtain a radiation sensitive resin compsn. having high coating performance and satisfactory shelf stability by incorporating a specified solvent. CONSTITUTION:This radiation sensitive resin compsn. contains an alkali-soluble resin, a radiation sensitive quionediazido compd. and one or more kinds of solvents selected from among 3-hydroxy-2-methylpropionic esters and 3-alkoxy-2- methylpropionic esters represented by formula I, 2-hydroxy-2-methylpropionic esters and 2-alkoxy-2-methylpropionic esters represented by formula II. In the formulae I, II, (m) is 0-4 and (n) is 1-4. Novolak resin, acrylic resin or a styrene- acrylic acid copolymer is effectively used as the alkali-soluble resin. |
