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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07297275(A)
申请公布日期
1995.11.10
申请号
JP19940081590
申请日期
1994.04.20
申请人
NEC CORP
发明人
YOKOYAMA HIROAKI
分类号
H01L21/76;H01L21/762;H01L29/78;(IPC1-7):H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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