| 摘要 |
PURPOSE:To provide a fine positioning device capable of executing multi-axis translation displacement without generating interference displacement. CONSTITUTION:A parallel deflected beam displacing mechanism 22x is constituted of rigid body parts 35, 36 and a straight driving part 50x, a parallel deflected beam displacing mechanism 22y is constituted of rigid body parts 34, 35 and a straight driving part 50y and a parallel deflected beam displacing mechanism 22z is constituted of rigid body parts 33, 34 and a straight driving part 50z. Respective straight driving parts 50x, 50y, 50z are constituted of actuators loaded between both the rigid body parts, and when the actuators are driven, curved deformation is generated in the parallel deflected beams of the mechanisms 22x, 22y, 22z and the mechanisms 22x, 22y, 22z are subjected to translation displacement in their reference directions (x, y and z axial directions). |
