MANUFACTURING DEVICE OF THIN FILM PHOTOELECTRIC CONVERSION ELEMENT

摘要

PURPOSE:To keep a film forming chamber section surrounding a film forming space at a distance from another film forming chamber section by supporting the chamber section by a supporting body provided with a driving section which moves the chamber section in the vertical direction. CONSTITUTION:A lower film forming chamber 21 is airtightly sealed by opening a casing 25 housing a ground electrode downward and the chamber 21 is airtightly sealed by pressing a flexible substrate 1 against an O-ring on a top plate 24 by means of the end face of the casing 25. The base of the chamber 21 is supported by struts 91 which can be moved in the vertical direction by means of the air cylinders 92 of a maintenance truck 9. At the time of forming a film, the base 23 is put in the lower opening of a comprehensive vacuum chamber 36 supported by a frame 11. At the time of maintenance, the film forming chamber 21 can be kept at a distance from another film forming chamber by lowering the chamber 21 until the upper surface of a top plate 24 becomes lower than the lower surface of the chamber 36 by driving the struts 91 and, at the same time, drawing out the truck 9 which can move in the lateral direction from the bottom of the chamber 36.