| 摘要 |
PURPOSE:To automatically correct an offset misregistration and to improve correction precision by automatically driving an XY table to allow a sample detection central axis to move and by detecting misregistration of an impression of a ball or a capillary. CONSTITUTION:Wire bonding is performed for samples one by one. An operation control part 36 moves a sample detection central axis to above an impression of a bonded ball or capillary by an offset correction control memory 35 at the time set at the offset correction control memory 35. Thereby, an impression of a ball or a capillary is imaged by a camera 11. The image is processed by an operation control part 24 of an image processing part 20 and a misregistration amount is calculated. The operation control part 36 of a device driving part 30 corrects an offset amount stored in an offset memory 39 by the calculated misregistration amount. |
