SURFACE INSPECTION METHOD FOR WAFER AND INSPECTION DEVICE,申请号JP19940090291-传众专利搜索

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发明名称	SURFACE INSPECTION METHOD FOR WAFER AND INSPECTION DEVICE
摘要
申请公布号	JPH07294447(A)	申请公布日期	1995.11.10
申请号	JP19940090291	申请日期	1994.04.27
申请人	SONY CORP	发明人	YOSHIKOSHI SHUNICHI
分类号	G01B11/30;G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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