Behandlungsapparat und Verfahren.,申请号DE19883854540-传众专利搜索

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发明名称	Behandlungsapparat und Verfahren.
摘要
申请公布号	DE3854540(D1)	申请公布日期	1995.11.09
申请号	DE19883854540	申请日期	1988.06.23
申请人	TEXAS INSTRUMENTS INC., DALLAS, TEX., US	发明人	DAVIS, CECIL J., GREENVILLE TEXAS 75401, US;LOEWENSTEIN, LEE M., PLANO TEXAS 75074, US;MATTHEWS, ROBERT T., PLANO TEXAS 75075, US;JONES, JOHN I., PLANO TEXAS 75023, US;JUCHA, RHETT B., CELESTE TEXAS 75423, US
分类号	H01L21/302;C23C16/48;C23C16/517;C23C16/54;G03F7/20;H01L21/027;H01L21/3065;H01L21/31;H01L21/677;(IPC1-7):C23C16/48;C23C16/50	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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