| 摘要 |
PURPOSE:To make a primary capacitor to generate strong arc discharging during the period of uniform pre-ionization and in the initial stage of pre- ionization by making the voltage applied across a gap for pre-ionization from the primary capacitor to steeply rise by eliminating the influence of a stray capacitance on the cable connecting the primary capacitor to a secondary capacitor. CONSTITUTION:A magnetic switch 12 is connected between the tip of a cable 15, one end of which is connected to a primary capacitor 13, and a feeder conductor 6 connected to a secondary capacitor 5 in a laser chamber l and the charging coil 14 of the primary capacitor is connected to the conductor 6. Since the primary capacitor is charged with a stray capacitance between the period from the turning on of a switching element 11 to the saturation of the switch 12, the cable 15 is not affected by the stray capacitance when the capacitance of the primary capacitor is transferred to the secondary capacitor 5. |
