SEMICONDUCTOR PROCESSING SYSTEMS

摘要

Processors (40, 400) for processing integrated circuit wafers (50), flat panel displays (650), semiconductor substrates, data disks and similar articles requiring very low contamination levels. An interface section (43, 401) receives wafers in standard wafer carriers (51). One preferred interface section transfers wafers (50) from carriers onto novel trays (60) for improved processing. In other forms the wafers or panels are transferred from carriers to form arrays (653) using a plurality of contact members (655). A conveyor (140) having an automated arm assembly (157) moves the articles between processing stations (71-3, 411-5). The processing stations are accessed from an enclosed work space (46) adjoining the interface section.