| 摘要 |
PURPOSE:To provide a solar battery manufacturing method by which a highly reliable thin film solar battery having a high conversion efficiency can be manufactured at low cost by making stable long-time film formation possible by improving an oxide film forming method and preventing the deterioration of the transparency, resistance, etc., of the oxide layer which occur when the film is formed at a high speed. CONSTITUTION:In a thin film solar battery manufacturing method in which a thin film semiconductor junction is formed on a transparent oxide layer after forming the oxide layer by sputtering on a substrate, at least the surface of which is composed of a metallic layer having a high reflectance against light, and transparent electrodes are formed on the junction, the oxide layer is formed by performing sputtering by using an oxide target having a resistivity of <=5.0OMEGA.cm and crystal grain size of <=15mu and discharging a mixed gas prepared by adding an oxygen (O2) gas to an Ar gas by 0.1-10%. |
