| 摘要 |
PURPOSE:To observe an inspection part surface of a sample with high resolution and with high efficiency without changing a focal distance of an electron beam. CONSTITUTION:Since a converging electrode 16 to form an electron beam 12 emitted from an electron source 11 as parallel electron beams 12 having the uniform current density distribution is arranged in an electron scanning system 10, and an emitting quantity of a secondary electron generated from this part becomes constant regardless of the relative positional relationship between the electron beams 12 and an inspection part surface of a sample, and a sample surface can be inspected in a short time, and the sample surface can be inspected with high efficiency, and a focal depth also becomes infinite, and the sample surface can be inspected without being influenced by a shape of the sample surface. |
