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发明名称
SUBSTRATE SUPPORT DEVICE FOR CVD APPARATUS
摘要
申请公布号
KR950013428(B1)
申请公布日期
1995.11.08
申请号
KR19910070507
申请日期
1991.05.20
申请人
JAPAN ASM CO., LTD.;NEC CO., LTD.
发明人
SHUTO, MITSUTOSHI;HUKAZAWA, YASUSHI;OSAKI, MINORU
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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