| 摘要 |
The invention relates to an electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques for use in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength lambda . According to the invention, the Fabry-Perot interferometer based sensor structure comprises a body block (1), two essentially parallel mirrors (41, 26) bonded to said body block (1), of which mirrors at least one (41) is partially transmitting and movable relative to the body block (1), said mirrors (41, 26) being spaced maximally by a few half-wavelengths, lambda /2, from each other, and both of the mirror structures (41, 26) include integral electrode structures (6, 20) capable of effecting an electrostatic force between said mirror structures (41, 26). According to the invention, the movable mirror structure (41) is provided with structurally weakened regions (15) surrounding the optical area (24) of the mirror so as to facilitate keeping the optical area (24) at a maximum degree of flatness, and at least one (20) of the electrode structures is adapted to surround said optical area (24) so as to achieve a mechanical lever action and avoid galvanic contact between the electrode (20) of the movable mirror structure (41) and the electrode (6) of the fixed mirror structure (26). <IMAGE> |
