发明名称 Suscepter and process for production thereof.
摘要 <p>A suscepter, which is composed substantially of a vitreous carbon derived from polycarbodiimide resin; and a process for producing a suscepter, which comprises molding a polycarbodiimide resin or a composition composed mainly of a polycarbodiimide resin, into a shape of a suscepter and then carbonizing the molded material in vacuum or an inert gas atmosphere. Said suscepter is free from the problems of the prior art, which has no pores on the surface and generates no impurity and which causes no cracking when used at high temperatures</p>
申请公布号 EP0666245(A3) 申请公布日期 1995.11.08
申请号 EP19950100019 申请日期 1995.01.02
申请人 NISSHINBO INDUSTRIES, INC. 发明人 SAITO, KAZUO, C/O NISSHINBO IND. INC., TOKYO RE.C.;ISHIMATSU, TAKESHI, C/O NISSHINBO IND. INC.
分类号 C04B35/524;H01L23/34;(IPC1-7):C04B35/524 主分类号 C04B35/524
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