发明名称 ION BEAM GENERATING APPARATUS
摘要 a first comparator for changing a voltage applied from an arc voltage supply source, a battery and so on by a variable voltage and for receiving the changed voltage as an inverted terminal and grounded to a non-inverted terminal; a second comparator for receiving an output the first comparator as an inverted terminal and grounded to a non-inverted terminal; a first switch connected to a positive voltage applied from the battery; a second switch connected to a negative voltage applied from the battery; and a clamping circuit connected to an output of the second comparator.
申请公布号 KR950013431(B1) 申请公布日期 1995.11.08
申请号 KR19920018654 申请日期 1992.10.10
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 SHIN, IN - DONG;KIM, WON - YONG;KIM, MIN - CHOL
分类号 H01L21/265;(IPC1-7):H01L21/265 主分类号 H01L21/265
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