发明名称 |
ION BEAM GENERATING APPARATUS |
摘要 |
a first comparator for changing a voltage applied from an arc voltage supply source, a battery and so on by a variable voltage and for receiving the changed voltage as an inverted terminal and grounded to a non-inverted terminal; a second comparator for receiving an output the first comparator as an inverted terminal and grounded to a non-inverted terminal; a first switch connected to a positive voltage applied from the battery; a second switch connected to a negative voltage applied from the battery; and a clamping circuit connected to an output of the second comparator.
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申请公布号 |
KR950013431(B1) |
申请公布日期 |
1995.11.08 |
申请号 |
KR19920018654 |
申请日期 |
1992.10.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIN, IN - DONG;KIM, WON - YONG;KIM, MIN - CHOL |
分类号 |
H01L21/265;(IPC1-7):H01L21/265 |
主分类号 |
H01L21/265 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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